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Stress-Induced Variations in the Stiffness of Micro- and Nanocantilever Beams

机译:应力诱导的微小和纳米悬崖刚度的变化   梁

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摘要

The effect of surface stress on the stiffness of cantilever beams remains anoutstanding problem in the physical sciences. While numerous experimentalstudies report significant stiffness change due to surface stress, theoreticalpredictions are unable to rigorously and quantitatively reconcile theseobservations. In this Letter, we present the first controlled measurements ofstress-induced change in cantilever stiffness with commensurate theoreticalquantification. Simultaneous measurements are also performed on equivalentclamped-clamped beams. All experimental results are quantitatively andaccurately predicted using elasticity theory. We also present conclusiveexperimental evidence for invalidity of the longstanding and unphysical axialforce model, which has been widely applied to interpret measurements usingcantilever beams. Our findings will be of value in the development of micro-and nanoscale resonant mechanical sensors.
机译:表面应力对悬臂梁刚度的影响仍然是物理科学中的突出问题。尽管大量的实验研究表明,由于表面应力而导致的刚度发生了显着变化,但理论上的预测无法严格和定量地协调这些观察。在这封信中,我们用相应的理论量化方法对应力引起的悬臂刚度变化进行了首次受控测量。同时对等效钳位束进行了同时测量。所有实验结果均使用弹性理论定量准确地预测。我们还提供了长期的和非物理的轴向力模型无效的结论性实验证据,该模型已广泛应用于解释使用悬臂梁的测量结果。我们的发现对开发微米级和纳米级共振机械传感器具有价值。

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